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de massaplaat dient met behulp van verbindingsstrips zodanig te worden verbonden met de kamer dat de gelijkstroomweerstand van de overgang niet meer dan 2,5 mΩ bedraagt.
the ground plane shall be bonded to the chamber with bonding straps such that the dc bonding resistance shall not exceed 2,5 milliohms.
Last Update: 2017-04-06
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