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abschirmelektrodenkonfiguration mit signalausgleich zur verwendung in kapazitiven verschiebungsmesssystemen und verfahren
signal-balanced shield electrode configuration for use in capacitive displacement sensing systems and methods
Last Update: 2014-11-28
Usage Frequency: 2
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lithografische vorrichtung für verschiebungsmesssysteme und geräteherstellungsverfahren dafür
displacement measurement systems lithographic apparatus and device manufacturing method
Last Update: 2014-11-28
Usage Frequency: 3
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