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the process of claim 14, wherein the silicon compound is si₂h₆.
procédé suivant la revendication 14, dans lequel le composé de silicium consiste en si₂h₆.
Last Update: 2014-12-04
Usage Frequency: 2
Quality:
the process of claim 19, wherein the silicon containing gas is si₂h₆.
procédé suivant la revendication 19, dans lequel le gaz contenant du silicium est si₂h₆.
Last Update: 2014-12-04
Usage Frequency: 2
Quality:
the process of claim 1, wherein the gas containing silicon atoms is si₂h₆.
procédé suivant la revendication 1, dans lequel le gaz contenant des atomes de silicium est si₂h₆.
Last Update: 2014-12-04
Usage Frequency: 2
Quality:
siliconimides containing si-h groups
siliconimides contenant des groupes si-h
Last Update: 2014-11-25
Usage Frequency: 8
Quality:
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