Results for scatterometric translation from English to French

scatterometric measuring array and measuring method
dispositif et procede de mesure diffusiometrique

improved system for scatterometric measurements and applications
systeme perfectionne de mesures de diffusiometrie et applications associees

scatterometric measurement of undercut multi-layer diffracting structures
mesure diffusiometrique de structures de diffraction multicouches sous-jacentes

to this end, the number of quantities measured relative to the standard “scatterometric” technique may be increased.
a cet effet, on peut augmenter le nombre de quantités mesurées par rapport à la technique « scattérométrique » standard.

the scatterometric data that is used to find the value of the one or more parameters can be limted to those at wavelengths that are less sensitive to the underlying film characteristics.
les données de diffusiomètrie que l'on utilise pour trouver la valeur d'un ou de plusieurs paramètres peuvent être limitées à celles correspondant à des longueurs d'onde moins sensibles aux caractéristiques du film sous-jacent.

the documents cited in the present description are the following: [1] b. k. minhas, s. a. coulombe, s. schail, h. naqvi and j. r. mcneil, ellipsometric scatterometry for the metrology of sub-0.1 μm, applied optics 37(22), pages 5112 to 5115, 1998 (2) thomas k. gaylord and m. g. moharam, analysis and applications of optical diffraction by gratings, proceedings of the ieee, 73(5), 1985 (3) l. c. botten, m. cadihac, g. h. derrick, d. maystre, r. c. mcphedran, m. nevière, r. petit and f. vincent, electromagnetic theory of gratings, topics in current physics, springer-verlag berlin heidelberg new york, r. petit edition, 1980 (4) h. press, a. teukolsky, t. vetterling and f. flannery, numerical recipes in c, cambridge university press, 1992 (5) e. m. drège, j. a. reed and d. m. byrne, linearized inversion of scatterometric data to obtain surface profile information, opt.
les documents cités dans la présente description sont les suivants : [1] b. k. minhas, s. a. coulombe, s. sohail, h. naqvi et j. r. mcneil, ellipsometric scatterometry for the metrology of sub-0.1 µm, applied optics, 37(22), pages 5112 à 5115, 1998 [2] thomas k. gaylord et m. g. moharam, analysis and applications of optical diffraction by gratings, proceedings of the ieee, 73(5), 1985 [3] l. c. botten, m. cadihac, g. h. derrick, d. maystre, r. c. mcphedran, m. nevière, r. petit et p. vincent, electromagnetic theory of gratings, topics in current physics, springer-verlag berlin heidelberg new york, r.petit edition, 1980 [4] h. press, a. teukolsky, t. vetterling et p. flannery, numerical recipes in c, cambridge university press, 1992 [5] e. m. drège, j. a. reed et d. m. byrne, linearized inversion of scatterometric data to obtain surface profile information, opt.