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verfahren zur herstellung einer isolationsgrabenstruktur mit verbundoxydschichten
method of forming a trench isolation structure utilizing composite oxide films
Last Update: 2014-11-28
Usage Frequency: 2
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isolationsgrabenstruktur für integrierte schaltung und verfahren zur herstellung.
trench isolation structure in an integrated circuit and method of formation.
Last Update: 2014-11-28
Usage Frequency: 2
Quality:
isolationsgrabenstruktur, hableiteranordnung mit solcher isolationsgrabenstruktur, und verfahren zur herstellung derselben
trench isolation structure, semiconductor assembly comprising such a trench isolation, and method for forming such a trench isolation
Last Update: 2014-11-28
Usage Frequency: 2
Quality: